Patents/Inventors

Tetsuro Nakasugi

Yokohama KanagawaJP2 patents

3 Patents

US120789252024
Imprint Apparatus and Imprint Method
Kioxia Corporation
0 cites
US119538252024
Imprint Apparatus, Imprint Method, and Manufacturing Method of Semiconductor Device
Kioxia Corporation
0 cites
US118374692023
Imprint Apparatus, Imprint Method, and Method of Manufacturing Semiconductor Device
Kioxia Corporation
0 cites