Patents/Inventors

Tetsuro Itagaki

TokyoJP4 patents

3 Patents

US125975892026
Electrostatic Chuck
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US122494922025
Electrostatic Chuck Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites
US121192122024
Wafer Support Device
SUMITOMO OSAKA CEMENT CO., Ltd.
0 cites