Patents/Inventors

Tetsuo Yamamoto

ToyamaJP2 patents

2 Patents

US125460022026
Reaction Tube, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US121319022024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites