Patents/Inventors

Tetsunori Maruyama

KanagawaJP2 patents

3 Patents

US122527752025
Sputtering Target, Method for Manufacturing Sputtering Target, and Method for Forming Thin Film
Semiconductor Energy Laboratory Co., Ltd.
0 cites
US119591652024
Semiconductor Device Comprising Oxide Semiconductor Film
Semiconductor Energy Laboratory Co., Ltd.
0 cites
US115455792023
Semiconductor Device and Method for Manufacturing the Same
Semiconductor Energy Laboratory Co., Ltd.
0 cites