Patents/Inventors

Tetsuji Sato

MiyagiJP4 patents

4 Patents

US125312132026
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123409852025
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US119617182024
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118255892023
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites