Patents/Inventors

Tetsuji Okada

SaitamaJP3 patents

3 Patents

US123931832025
Simulation Method, Simulation Apparatus, Film Forming Apparatus, Article Manufacturing Method, and Non-transitory Computer-readable Storage Medium
CANON KABUSHIKI KAISHA
0 cites
US122769082025
Imprint Method and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US117684442023
Imprint Apparatus and Method of Manufacturing Article
Canon Kabushiki Kaisha
0 cites