Patents/Inventors

Teppei Adachi

JoetsuJP3 patents

4 Patents

US120726272024
Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US120504022024
Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US116933142023
Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US116626632023
Substrate Protective Film-forming Composition and Pattern Forming Process
Shin-etsu Chemical Co., Ltd.
0 cites