Tensei Sato

3 Patents

• US121911782025

  Semiconductor Manufacturing Apparatus, Failure Prediction Method for Semiconductor Manufacturing Apparatus, and Failure Prediction Program for Semiconductor Manufacturing Apparatus

  EBARA CORPORATION

  0 cites
• US118668422024

  Short Circuit Detection Method in Plating Apparatus, Control Method of Plating Apparatus, and Plating Apparatus

  EBARA CORPORATION

  0 cites
• US116616692023

  Substrate Processing System, Controller and Method Using Test Operation Without Substrate

  EBARA CORPORATION

  0 cites