Patents/Inventors

Tejas Ulavi

San Jose, CAUS11 patents

11 Patents

US121836182024
Apparatus and Methods to Transfer Substrates Into and Out of a Spatial Multi-substrate Processing Tool
Applied Materials, Inc.
0 cites
US120875552024
Method and System for Cleaning a Process Chamber
Applied Materials, Inc.
0 cites
US120183762024
Apparatus and Methods for Motor Shaft and Heater Leveling
Applied Materials, Inc.
0 cites
US120209572024
Heater Assembly with Process Gap Control for Batch Processing Chambers
Applied Materials, Inc.
0 cites
US119503842024
Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers
APPLIED MATERIALS, Inc.
0 cites
US119232332024
Dual-function Wafer Backside Pressure Control and Edge Purge
APPLIED MATERIALS, Inc.
0 cites
US117911902023
Apparatus and Methods for Real-time Wafer Chucking Detection
APPLIED MATERIALS, Inc.
0 cites
US117696842023
Wafer Heater with Backside and Integrated Bevel Purge
Applied Materials, Inc.
0 cites
US116825762023
Pedestal Heater for Spatial Multi-wafer Processing Tool
Applied Materials, Inc.
0 cites
US116232532023
In-situ DC Plasma for Cleaning Pedestal Heater
APPLIED MATERIALS, Inc.
0 cites
US116020642023
Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers
APPLIED MATERIALS, Inc.
0 cites