Patents/Inventors

Teis Johan Coenen

VughtNL3 patents

4 Patents

US123994282025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US123259112025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US121408752024
Metrology Measurement Method and Apparatus
ASML Netherlands B.V.
0 cites
US119962672024
Particle Beam Apparatus, Defect Repair Method, Lithographic Exposure Process and Lithographic System
ASML NETHERLANDS B.V.
0 cites