Te-sheng Wang

5 Patents

• US125717482026

  System and Method for Determining Local Focus Points During Inspection in a Charged Particle System

  ASML Netherlands B.V.

  0 cites
• US123151752025

  Method in the Manufacturing Process of a Device, a Non-transitory Computer-readable Medium and a System Configured to Perform the Method

  ASML NETHERLANDS B.V.

  0 cites
• US121971342025

  Apparatus and Method for Process-window Characterization

  ASML NETHERLANDS B.V.

  0 cites
• US116690182023

  Simulation-assisted Alignment Between Metrology Image and Design

  ASML NETHERLANDS B.V.

  0 cites
• US115927522023

  Apparatus and Method for Process-window Characterization

  ASML Netherlands B.V.

  0 cites