Patents/Inventors

Tatsuya Miyahara

YamanashiJP7 patents

7 Patents

US125711252026
Method for Forming Polycrystalline Silicon Film
Tokyo Electron Limited
0 cites
US124380552025
Abnormality Detection Method and Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123519042025
Film Deposition Method and Method for Forming Polycrystalline Silicon Film
Tokyo Electron Limited
0 cites
US122527862025
Cleaning Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US121129472024
Method of Crystallizing Amorphous Silicon Film and Deposition Apparatus
Tokyo Electron Limited
0 cites
US120805522024
Method of Depositing Silicon Film and Film Deposition Apparatus
Tokyo Electron Limited
0 cites
US116004902023
Silicon Film Forming Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites