Patents/Inventors

Tatsuro Ohshita

MiyagiJP4 patents

5 Patents

US125371682026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125371722026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123225782025
Exhaust Device, Processing Apparatus, and Exhausting Method
Tokyo Electron Limited
0 cites
US121365352024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117767952023
Plasma Processing Apparatus and Power Supply Control Method
TOKYO ELECTRON LIMITED
0 cites