Patents/Inventors

Tatsuro Masuyama

OsakaJP5 patents

6 Patents

US121745372024
Salt, Acid Generator, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US119472572024
Salt, Acid Generator, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US118222442023
Compound, Resin, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US118158132023
Compound, Resin, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US117390562023
Carboxylate, Carboxylic Acid Generator, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US116812182023
Compound, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites