Patents/Inventors

Tatsuo Matsudo

YamanashiJP7 patents

8 Patents

US124826352025
Plasma Processing Device, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US124760842025
Plasma Processing Apparatus, High-frequency Power Supply Circuit, and Impedance Matching Method
Kyushu University, National University Corporation
0 cites
US124566052025
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US123879082025
Plasma Treatment Apparatus
Tokyo Electron Limited
0 cites
US121911242025
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US120273442024
Film Forming Apparatus
Tokyo Electron Limited
0 cites
US120209002024
Plasma Processing Device, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US119729212024
Temperature Measurement System, Temperature Measurement Method, and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites