Patents/Inventors

Tatsuo Hirasawa

YamanashiJP2 patents

3 Patents

US120273532024
Substrate Processing Method and Apparatus
Tokyo Electron Limited
0 cites
US120149112024
Sputtering Apparatus
Tokyo Electron Limited
0 cites
US117421902023
Sputtering Apparatus and Film Forming Method
Tokyo Electron Limited
0 cites