Patents/Inventors

Tatsuo Abe

ShirakawaJP4 patents

4 Patents

US124826472025
Method for Forming Thermal Oxide Film on Semiconductor Substrate
SHIN-ETSU HANDOTAI CO., Ltd.
0 cites
US124409432025
Method and Apparatus for Polishing Wafer
SHIN-ETSU HANDOTAI CO., Ltd.
0 cites
US123082252025
Method for Forming Thermal Oxide Film on Semiconductor Substrate
SHIN-ETSU HANDOTAI CO., Ltd.
0 cites
US118783292024
Method for Cleaning Silicon Wafer
SHIN-ETSU HANDOTAI CO., Ltd.
0 cites