Patents/Inventors

Tatsuhiko Tsujihashi

KumamotoJP3 patents

4 Patents

US123121842025
Substrate Transfer Device and Substrate Transfer Method
TOKYO ELECTRON LIMITED
0 cites
US120740482024
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
USD10123112024
Holding Pad for Carrying Substrate
TOKYO ELECTRON LIMITED
0 cites
USD10115502024
Holding Pad for Carrying Substrate
TOKYO ELECTRON LIMITED
0 cites