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Inventors
Tatsuhiko Aoki
Niigata
JP
2 patents
3 Patents
US12488979
2025
Lamination Wafers and Method of Producing Bonded Wafers Using the Same
GLOBALWAFERS JAPAN CO., Ltd.
0 cites
US12378695
2025
Method for Heat-treating Silicon Wafer
GLOBALWAFERS JAPAN CO., Ltd.
0 cites
US12371813
2025
Silicon Wafer and Method for Producing Silicon Wafer
TOHOKU UNIVERSITY
0 cites