Patents/Inventors

Tatehito Usui

TokyoJP7 patents

7 Patents

US125736012026
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US123810712025
Plasma Processing Method and Plasma Processing Apparatus
Hitachi High-tech Corporation
0 cites
US121319642024
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US120515742024
Wafer Processing Method and Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US119159512024
Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US118759782024
Plasma Processing Apparatus and Plasma Processing Method
Hitachi High-tech Corporation
0 cites
US115691352023
Plasma Processing Method and Wavelength Selection Method Used in Plasma Processing
HITACHI HIGH-TECH CORPORATION
0 cites