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Inventors
Taro Usami
Kasamatsu-Town
JP
8 patents
6 Patents
US12598951
2026
Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites
US12580163
2026
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites
US12451822
2025
Feeder Member and Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites
US12444587
2025
Wafer Placement Table with Heat Dissipation Sheet
NGK INSULATORS, Ltd.
0 cites
US12283511
2025
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites
US12211729
2025
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites