37 Patents
- 0 cites
- 0 cites
- US126092852026Semiconductor Manufacturing Apparatus and Manufacturing Method for Semiconductor Device
TOKYO ELECTRON LIMITED
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- US120515642024Shower Plate, Plasma Processing Apparatus and Plasma Processing Method
TOHOKU UNIVERSITY
0 cites - US120464552024Shower Plate, Lower Dielectric Member and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- 0 cites
- US117053102023Plasma Probe Device, Plasma Processing Apparatus, and Control Method
TOKYO ELECTRON LIMITED
0 cites - 0 cites