4 Patents
- US124972842025Driving Circuits for a Piezoelectric Microelectromechanical System Mirror
Teknologian Tutkimuskeskus VTT Oy
0 cites - US124349602025Driving Circuits for a Piezoelectric Microelectromechanical System Mirror
Teknologian Tutkimuskeskus VTT Oy
0 cites - 0 cites
- US117672182023Microelectromechanical Capacitive Pressure Sensor Having a Valve Portion Being Operable to Close First Output and Open Second Output to Equalize Pressure
Teknologian Tutkimuskeskus VTT Oy
0 cites