Tang-kuei Chang

7 Patents

• US126222452026

  Ion Implant Process for Defect Elimination in Metal Layer Planarization

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US125687862026

  Processing Tool and Method

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US122973752025

  Slurry Composition and Method for Polishing and Integrated Circuit

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US120681952024

  Metal Loss Prevention Using Implantation

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US120026842024

  Methods for Chemical Mechanical Polishing and Forming Interconnect Structure

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US117106592023

  Metal Loss Prevention Using Implantation

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US116580652023

  Chemical Mechanical Polishing Slurry Composition, Method for Chemical Mechanical Polishing and Method for Forming Connecting Structure

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites