Patents/Inventors

Tamer Mohamed Tawfik Ahmed Mohamed Elazhary

New Canaan, CTUS6 patents

6 Patents

US125852012026
Metrology Mark Structure and Method of Determining Metrology Mark Structure
ASML NETHERLANDS B.V.
0 cites
US124870812025
On Chip Wafer Alignment Sensor
ASML Holding N.V.
0 cites
US121408722024
Optical Designs of Miniaturized Overlay Measurement System
ASML Holding N.V.
0 cites
US120667622024
On Chip Sensor for Wafer Overlay Measurement
ASML Holding N.V. & ASML Netherlands B.V.
0 cites
US117893682023
Lithographic Apparatus, Metrology System, and Illumination Systems with Structured Illumination
ASML Holding N.V.
0 cites
US116751922023
Hybrid Coupling Diffractive Optical Element
META PLATFORMS TECHNOLOGIES, LLC
0 cites