16 Patents
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- US123796712025Model Based Dynamic Positional Correction for Digital Lithography Tools
Applied Materials, Inc.
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- US123728812025Deep Learning Based Adaptive Alignment Precision Metrology for Digital Overlay
Applied Materials, Inc.
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- US122482542025Universal Metrology File, Protocol, and Process for Maskless Lithography Systems
Applied Materials, Inc.
0 cites - US122427892025Overlaying on Locally Dispositioned Patterns by ML Based Dynamic Digital Corrections (ML-DDC)
Applied Materials, Inc.
0 cites - US119347622024Overlaying on Locally Dispositioned Patterns by ML Based Dynamic Digital Corrections (ML-DDC)
Applied Materials, Inc.
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