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Inventors
Tamara Druzhinina
Eindhoven
NL
3 patents
4 Patents
US12500063
2025
Method and Apparatus for Inspection
ASML NETHERLANDS B.V.
0 cites
US12399428
2025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US12325911
2025
Method and Apparatus for Forming a Patterned Layer of Material
ASML NETHERLANDS B.V.
0 cites
US11875966
2024
Method and Apparatus for Inspection
ASML NETHERLANDS B.V.
0 cites