Patents/Inventors

Tamal Mukherjee

Fremont, CAUS5 patents

6 Patents

US124179022025
Method for Cleaning a Chamber
Lam Research Corporation
0 cites
US124008422025
Method of Cleaning Chamber Components with Metal Etch Residues
Lam Research Corporation
0 cites
US122665422025
Atomic Layer Etching for Subtractive Metal Etch
Lam Research Corpporation
0 cites
US122566452025
Chemical Etch Nonvolatile Materials for MRAM Patterning
Lam Research Corporation
0 cites
US120805622024
Atomic Layer Etch and Ion Beam Etch Patterning
Lam Research Corporation
0 cites
US119357582024
Atomic Layer Etching for Subtractive Metal Etch
Lam Research Corporation
0 cites