Patents/Inventors

Takuya Nishijima

MiyagiJP5 patents

6 Patents

US124244232025
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123775032025
Part Replacement System and Part Replacement Device
TOKYO ELECTRON LIMITED
0 cites
US123476602025
Substrate Processing Apparatus, Substrate Processing System, and Maintenance Method
TOKYO ELECTRON LIMITED
0 cites
US120401662024
Substrate Processing Apparatus, Substrate Processing System, and Maintenance Method
TOKYO ELECTRON LIMITED
0 cites
US120026662024
Measuring Device, Measuring Method, and Vacuum Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119929122024
Part Replacement System and Part Replacement Device
TOKYO ELECTRON LIMITED
0 cites