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Inventors
Takuya Kubo
Tokyo
JP
3 patents
4 Patents
US12336436
2025
Etching Method
Tokyo Electron Limited
0 cites
US12281092
2025
Compound or Salt Thereof, Composition, Chemiluminescence Method, Method for Measuring Chemiluminescence Signal, Reagent, Reagent Kit, and Method for Assaying Analyte
SYSMEX CORPORATION
0 cites
US11878353
2024
Diamond-coated Rotary Cutting Tool
MITSUBISHI MATERIALS CORPORATION
0 cites
US11832524
2023
Method for Processing Substrate, Processing Apparatus, and Processing System
Tokyo Electron Limited
0 cites