Patents/Inventors

Takuya Kawaguchi

YamanashiJP5 patents

5 Patents

US125842202026
Showerhead and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US122278432025
Film Forming Method and Tungsten Film
Tokyo Electron Limited
0 cites
US122216932025
Stress Reducing Method
Tokyo Electron Limited
0 cites
US121881252025
Showerhead and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US118735562024
Raw Material Supply Apparatus and Film Forming Apparatus
Tokyo Electron Limited
0 cites