Patents/Inventors

Takuto Shoji

ToyamaJP2 patents

2 Patents

US125406952026
Conversion Pipe Arrangement, Substrate Processing Apparatus, Method of Processing Substrate, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites
USD09801772023
Ceiling Heater for Substrate Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites