Takuro Tsutsui

4 Patents

• US124807562025

  Virtual Metrology Apparatus, Virtual Metrology Method, and Virtual Metrology Program

  Tokyo Electron Limited

  0 cites
• US123271862025

  Abnormality Detecting Device and Abnormality Detecting Method

  TOKYO ELECTRON LIMITED

  0 cites
• US121762272024

  State Determination Device, State Determination Method, and Computer-readable Recording Medium

  TOKYO ELECTRON LIMITED

  0 cites
• US115980072023

  Substrate State Determining Apparatus, Substrate Processing Apparatus, Model Generating Apparatus, and Substrate State Determining Method

  TOKYO ELECTRON LIMITED

  0 cites