Takumi Yanagawa

3 Patents

• US125059912025

  Tunability of Edge Plasma Density for Tilt Control

  Lam Research Corporation

  0 cites
• US120209442024

  Method for Etching an Etch Layer

  Lam Research Corporation

  0 cites
• US116878082023

  Artificial Intelligence Explaining for Natural Language Processing

  International Business Machines Corporation

  0 cites