Patents/Inventors

Takuma Yamanaka

OyamaJP3 patents

2 Patents

US125716802026
Wavelength Measurement Apparatus, Narrowed-line Laser Apparatus, and Method for Manufacturing Electronic Devices
Gigaphoton Inc.
0 cites
US119789972024
Laser Apparatus and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites