Patents/Inventors

Taku Yamada

YokohamaJP8 patents

7 Patents

US121988912025
Charged Particle Beam Writing Apparatus, Charged Particle Beam Writing Method and Recording Medium
Nuflare Technology, Inc.
0 cites
US121394452024
Method of Producing Hydrofluoroolefin
AGC Inc.
0 cites
US121424502024
Photoelectric-surface Electron Source
HAMAMATSU PHOTONICS K.K.
0 cites
US120464472024
Multi-charged-particle-beam Writing Method, Multi-charged-particle-beam Writing Apparatus, and Computer-readable Recording Medium
Nuflare Technology, Inc.
0 cites
US116641912023
Electron Beam Irradiation Apparatus and Electron Beam Irradiation Method
Nuflare Technology, Inc.
0 cites
US116211402023
Multiple Electron Beam Writing Apparatus and Multiple Electron Beam Writing Method
Nuflare Technology, Inc.
0 cites
US115628782023
Method for Controlling Operation of Electron Emission Source, Electron Beam Writing Method, and Electron Beam Writing Apparatus
Nuflare Technology, Inc.
0 cites