Patents/Inventors

Taku Gohira

MiyagiJP4 patents

5 Patents

US122725262025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120805212024
Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US118043792023
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117495082023
Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US116315902023
Substrate Processing Method, Substrate Processing Apparatus and Cleaning Apparatus
TOKYO ELECTRON LIMITED
0 cites