Patents/Inventors

Takeshi Oyama

MiyagiJP4 patents

3 Patents

US125097662025
Film Deposition Method and Film Deposition Apparatus
Tokyo Electron Limited
0 cites
US124696942025
Film Forming Method
Tokyo Electron Limited
0 cites
US119707682024
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites