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Inventors
Takeshi Okato
Tokyo
JP
3 patents
3 Patents
US12306530
2025
Reflective Mask Blank, Reflective Mask, Method of Manufacturing Reflective Mask Blank, and Method of Manufacturing Reflective Mask
AGC Inc.
0 cites
US12228853
2025
Reflective Mask Blank, Reflective Mask, and Manufacturing Method
AGC Inc.
0 cites
US12001133
2024
Reflective Mask Blank, Reflective Mask, Method of Manufacturing Reflective Mask Blank, and Method of Manufacturing Reflective Mask
AGC Inc.
0 cites