23 Patents
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- US125711022026Ignition Control Method, Film Forming Method, and Film Forming Apparatus
TOKYO ELECTRON LIMITED
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- US124889612025Ignition Controlling Method, Film Forming Method, and Film Forming Apparatus
TOKYO ELECTRON LIMITED
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- US123051922025Method for Producing Artificial Recombinant RNA Virus Stably Retaining Foreign Gene
OSAKA UNIVERSITY
0 cites - US121318892024Plasma Generating Apparatus, Plasma Processing Apparatus, and Plasma Processing Method
TOKYO ELECTRON LIMITED
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- US119729212024Temperature Measurement System, Temperature Measurement Method, and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
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- US119011582024Plasma Processing Method, Plasma Processing Apparatus, and Control Apparatus
TOKYO ELECTRON LIMITED
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- US117235732023Stretchable Raised Electrode and Method of Manufacturing Thereof
National Institute Of Advanced Industrial Science And Technology
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- US115726252023Rotation Detection Jig, Substrate Processing Apparatus and Method of Operating the Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
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