Takeshi Iizumi

3 Patents

• US125884802026

  Method of Manufacturing Barrier-metal-free Metal Interconnect Structure, and Barrier-metal-free Metal Interconnect Structure

  EBARA CORPORATION

  0 cites
• US123437702025

  Cleaning Device and Cleaning Method

  EBARA CORPORATION

  0 cites
• US118482162023

  Cleaning Apparatus for Cleaning Member, Substrate Cleaning Apparatus and Cleaning Member Assembly

  Ebara Corporation

  0 cites