Patents/Inventors

Takeo Nakano

NirasakiJP4 patents

5 Patents

US124446062025
Methods for Forming Vertically Layered Ionic Liquid Crystal (ILC) Structures on a Semiconductor Substrate
Tokyo Electron Limited
0 cites
US124179282025
Substrate Processing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US124068622025
Vacuum Processing Apparatus and Oxidizing Gas Removal Method
Tokyo Electron Limited
0 cites
US123983242025
Methods for Controlling the Pitch of Self-assembled Ionic Liquid Crystal (ILC) Structures
Tokyo Electron Limited
0 cites
US120117382024
Substrate Processing Method and Ionic Liquid
TOKYO ELECTRON LIMITED
0 cites