Patents/Inventors

Takeo Hanashima

ToyamaJP15 patents

14 Patents

US125403882026
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US125291372026
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US124379872025
Processing Method, Method of Manufacturing Semiconductor Device, Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US124008552025
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US123519082025
Substrate Processing Method, Recording Medium, and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
US120657412024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites
US120538052024
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US120401792024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US119526642024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites
US119231882024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US118147252023
Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US117840442023
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US117537162023
Method of Processing Substrate, Substrate Processing Apparatus, Recording Medium, and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US115426012023
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
HITACHI KOKUSAI ELECTRIC Inc.
0 cites