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Inventors
Takehito Watanabe
Miyagi
JP
2 patents
3 Patents
US12033838
2024
Plasma Processing Apparatus and Wear Amount Measurement Method
TOKYO ELECTRON LIMITED
0 cites
US11831985
2023
Camera and Control Method
SONY SEMICONDUCTOR SOLUTIONS CORPORATION
0 cites
US11556853
2023
Learning Method, Management Device, and Management Program
TOKYO ELECTRON LIMITED
0 cites