Patents/Inventors

Takehisa Saito

MiyagiJP2 patents

3 Patents

US124943442025
Antenna for Inductively Coupled Plasma Excitation, Antenna Unit for Inductively Coupled Plasma Excitation, and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123409752025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118323732023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites