Patents/Inventors

Takehiro Tanikawa

KurokawagunJP13 patents

5 Patents

US126032482026
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US122304832025
Deposition Method and Processing Apparatus
Tokyo Electron Limited
0 cites
US119843002024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119786142024
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118697502024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites