Patents/Inventors

Takehiro Shindo

YamanashiJP20 patents

19 Patents

US125989452026
Path Setting System, Path Setting Method, and Software
Tokyo Electron Limited
0 cites
US125060232025
Opening/closing Apparatus and Transport Chamber
TOKYO ELECTRON LIMITED
0 cites
US124697242025
Correction Method and Substrate Transfer Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124612122025
Substrate Processing System and Method of Estimating Height of Annular Member
Tokyo Electron Limited
0 cites
US124409712025
Apparatus for Transporting Substrate, System for Processing Substrate, and Method of Transporting Substrate
Tokyo Electron Limited
0 cites
US123946452025
Substrate Processing System and Method of Teaching Transfer Device
Tokyo Electron Limited
0 cites
US123622152025
Apparatus for Transferring Substrate and Method for Transferring Substrate
Tokyo Electron Limited
0 cites
US123308882025
Substrate Transfer Device and Method of Cooling Arm
TOKYO ELECTRON LIMITED
0 cites
US123226422025
Substrate Transfer Device and Substrate Transfer Method
Tokyo Electron Limited
0 cites
US122241932025
Control Method and Substrate Transfer System
Tokyo Electron Limited
0 cites
US122117192025
Method of Controlling Substrate Transfer System and the Substrate Transfer System
TOKYO ELECTRON LIMITED
0 cites
US121836192024
Method of Delivering Substrate, and Substrate Delivery System
TOKYO ELECTRON LIMITED
0 cites
US120947462024
Semiconductor Manufacturing Apparatus and Method of Controlling Rotation of Stage
TOKYO ELECTRON LIMITED
0 cites
US120092402024
Apparatus for Transporting Substrate, System for Processing Substrate, and Method of Transporting Substrate
Tokyo Electron Limited
0 cites
US119843402024
Teaching Method
Tokyo Electron Limited
0 cites
US119617582024
Apparatus for Processing Substrate and Method of Transferring Substrate
Tokyo Electron Limited
0 cites
US119488222024
Substrate Transfer Device and Substrate Processing System
Tokyo Electron Limited
0 cites
US118507432023
Transport Apparatus, Semiconductor Manufacturing Apparatus, and Transport Method
TOKYO ELECTRON LIMITED
0 cites
US117768312023
Substrate Transport System and Substrate Transport Method
Tokyo Electron Limited
0 cites