Patents/Inventors

Takehiko Orii

YamanashiJP4 patents

4 Patents

US125387282026
Etching Method and Etching Device
TOKYO ELECTRON LIMITED
0 cites
US121721982024
Gas Cluster Processing Device and Gas Cluster Processing Method
IWATANI CORPORATION
0 cites
US115944172023
Etching Method and Apparatus
TOKYO ELECTRON LIMITED
0 cites
US115811922023
Etching Method and Etching Apparatus
TOKYO ELECTRON LIMITED
0 cites