Takeharu Motokawa

4 Patents

• US125735962026

  Plasma Treatment Apparatus, Plasma Treatment Method, and Original Plate Manufacturing Method

  Kioxia Corporation

  0 cites
• US125753852026

  Etching Method, Etching Apparatus, Manufacturing Method of Semiconductor Device, and Manufacturing Method of Template

  Kioxia Corporation

  0 cites
• US119319232024

  Method of Manufacturing Template and Method of Forming Pattern

  Kioxia Corporation

  0 cites
• US117893652023

  Substrate Processing Method and Substrate Processing Apparatus

  Kioxia Corporation

  0 cites