Patents/Inventors

Takayuki Yamagishi

TokyoJP3 patents

4 Patents

US125001002025
Connected Processing Container and Substrate Processing Method
Tokyo Electron Limited
0 cites
US123879482025
System for Processing Substrate and Maintenance Method Thereof
Tokyo Electron Limited
0 cites
US121836032024
Processing Module and Processing Method
Tokyo Electron Limited
0 cites
US119963062024
Coupled Processing Containers, Substrate Processing System, and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites